Ultra-High Purity Arsine(AsH3) Gas

Our Ultra-High Purity (UHP) Arsine (AsH3) is a premium electronic specialty gas engineered specifically for the stringent demands of advanced semiconductor manufacturing, high-speed optoelectronics, and photovoltaic cell production.

Through meticulous synthesis and multi-stage cryogenic purification, we provide arsine that minimizes critical moisture, oxygen, and metallic impurities, ensuring exceptional process stability and maximizing wafer yield across sensitive epitaxial layers.

Technical Specifications & Performance

Industry Benchmark Alignment

We manufacture and purify our arsine gas to meet or exceed the rigorous quality and consistency standards established by global industry leaders:

• Purity & Consistent Yields: Match the ultra-high purity electronic-grade standards of Nata, ensuring seamless integration into III-V compound semiconductor lines and high-brightness LED manufacturing.

• Bulk & Specialized Supply: Aligned with the high-volume reliability, rigorous logistics safety, and global supply chain standards of Linde and Air Liquide

• Advanced Packaging Compatibility: Fully compatible with standard high-pressure cylinder configurations as well as sub-atmospheric safe delivery systems (SDS/VAC) similar to those pioneered by Entegris, minimizing operational risk and optimizing gas cabinet safety.

Key Applications

• Compound Semiconductors (III-V): The primary arsenic precursor for growing Gallium Arsenide (GaAs), Indium Gallium Arsenide (InGaAs), and Aluminum Gallium Arsenide (AlGaAs) crystalline layers via Metalorganic Chemical Vapor Deposition (MOCVD).

• Semiconductor Doping: Essential source for n-type doping in silicon epitaxial growth and diffusion processes.

• Ion Implantation: Extremely stable performance in ion sources for precise subsurface depth profiling in high-frequency RF devices and power semiconductors.

Safe Packaging & Delivery Options

Arsine is a highly toxic and flammable gas requiring uncompromising safety protocols. We offer tailored packaging solutions designed to integrate seamlessly into your existing gas distribution architecture:

• High-pressure carbon steel or aluminum cylinders with ultra-clean, passivated internal surfaces to ensure long-term stability.

• Advanced valve configurations (including tied-diaphragm and DISS connections) to prevent micro-leakage.

• Customized blending options (e.g., AsH3 diluted in Ultra-High Purity Hydrogen, Helium, or Nitrogen) tailored to your specific mass flow controller (MFC) calibrations.

Secure Your Supply Chain

Quality Assurance: Every cylinder is shipped with a lot-specific Certificate of Analysis (CoA) generated via high-sensitivity Gas Chromatography (GC) and ICP-MS analysis.

Request a Quotation or Technical Consultation

Looking to qualify a reliable, high-purity AsH3 source for your production line, or need custom dilution specs for high-speed device fabrication? Our global logistics and technical engineering teams are ready to assist.